Functional Materials

Assoc. Prof. KAKIUCHI, Hiroaki, D.Eng.
(Tel.06-6879-7269)

High Speed Deposition of a-Si Thin Films by Atmospheric Pressure Plasma-CVD method.
Growth and Characterization of a-SiC Films for X-ray Mirrors.
Low Temperature Growth of Large Grain Poly-Si Films by RF Sputtering Method
Fabrication and Characterization of III-V Nitride Quantum Well Structures by MBE.
Development of Sheet Growth Method for Dislocation-Free Si Single Crystals.

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- Brief History and Philosopy
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Last revised on Jul. 8, 2001 by M. Nakano

Functional Materials

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Servers in Osaka University