Facility
We buit class-1 clean rooms, where particles and dust are removed and temperature, moisture, and vibration are perfectly controlled. We can study cutting-edge research and develope high-performance devices in the room.
Ultra Clean Facirity (UCF)
The building for the UCF. Let's enter!
Here is dressing room for clean wear. Even in this room, particles are less than an usual office by a factor of 1,000!
Air shower remove particles on your clean wear.
We have many special high-performance equipments in this large clean room.
Draft chambers for acid, organic solvent, and so on.
We also have many equipments even in the first basement floor.
Other equipments in UCF（）
Nano indenter
Electron Spin Resonance
Scanning Electron Microscope
X-ray Photoelectron Spectroscopy
Focused Ion Beam
Atomic force microscope
Numerically Controlled Plasma CVM Apparatus
X-ray diffraction
Ultra Clean Room(UCR)
Transmission Electron Microscope
Scanning Tunneling Microscope
Fourier Transform Infrared Spectroscopy
Thermal Desorption Spectrometry
Other equipments（Out of clean rooms）
Computer Cluster System
Noncontact Atomic Force Microscope
Ti/Sapphire femtosecond pulse laser
Scanning White Light Interferometer
Nano Search Microscope
